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"Efficient and accurate RIE modeling methodology for BEOL 2.5D parasitic ..."

Nur Kurt-Karsilayan, Jim Falbo, Dusan Petranovic (2014)

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DOI: 10.1109/MWSCAS.2014.6908466

access: closed

type: Conference or Workshop Paper

metadata version: 2020-03-27

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  - conf/mwscas/Kurt-Karsilayan14
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Nur Kurt-Karsilayan, Jim Falbo, Dusan Petranovic:
Efficient and accurate RIE modeling methodology for BEOL 2.5D parasitic extraction. MWSCAS 2014: 519-522

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