"Dynamic deformation of stretched membrane in drum-type micromirror."

Subrata Kumar Kundu et al. (2011)

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DOI: 10.1109/MHS.2011.6102188

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki:
Dynamic deformation of stretched membrane in drum-type micromirror. MHS 2011: 255-260

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