"Advanced Physical Models for Mask Data Verification and Impacts on ..."

Qi-De Qian, Sheldon X.-D. Tan (2003)

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DOI: 10.1109/ISQED.2003.1194720

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Qi-De Qian, Sheldon X.-D. Tan:
Advanced Physical Models for Mask Data Verification and Impacts on Physical Layout Synthesis. ISQED 2003: 125-130

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