"Improved RF Performance with Buried Power Rail and Contact over Active ..."

Hao-Chi Chiu, Vita Pi-Ho Hu (2024)

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DOI: 10.1109/ISCAS58744.2024.10558338

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-16

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Hao-Chi Chiu, Vita Pi-Ho Hu:
Improved RF Performance with Buried Power Rail and Contact over Active Gate in Nanosheet FETs. ISCAS 2024: 1-5

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