"Further Investigation on Mechanism of Trap Level Modulation in Silicon ..."

Harumi Seki, Yasushi Nakasaki, Yuichiro Mitani (2020)

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DOI: 10.1109/IRPS45951.2020.9128224

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-30

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Harumi Seki, Yasushi Nakasaki, Yuichiro Mitani:
Further Investigation on Mechanism of Trap Level Modulation in Silicon Nitride Films by Fluorine Incorporation. IRPS 2020: 1-7

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