"Using dedicated device arrays for the characterization of TDDB in a scaled ..."

Pablo Saraza-Canflanca et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10117773

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Pablo Saraza-Canflanca, Javier Diaz-Fortuny, Andrea Vici, Erik Bury, Robin Degraeve, Ben Kaczer:
Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology. IRPS 2023: 1-6

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