"Study on mechanism of thermal curing in ultra-thin gate dielectrics."

Yuichiro Mitani, Yusuke Higashi, Yasushi Nakasaki (2018)

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DOI: 10.1109/IRPS.2018.8353554

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Yuichiro Mitani, Yusuke Higashi, Yasushi Nakasaki:
Study on mechanism of thermal curing in ultra-thin gate dielectrics. IRPS 2018: 3

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