"On the voltage dependence of copper/low-k dielectric breakdown."

Shou-Chung Lee, A. S. Oates (2015)

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DOI: 10.1109/IRPS.2015.7112699

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Shou-Chung Lee, A. S. Oates:
On the voltage dependence of copper/low-k dielectric breakdown. IRPS 2015: 3

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