"Comparative Analysis of the Degradation Mechanisms in Logic and I/O FinFET ..."

Gaspard Hiblot et al. (2019)

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DOI: 10.1109/IRPS.2019.8720525

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-31

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Gaspard Hiblot, Yefan Liu, Geert Hellings, Geert Van der Plas:
Comparative Analysis of the Degradation Mechanisms in Logic and I/O FinFET Devices Induced by Plasma Damage. IRPS 2019: 1-5

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