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"High sensitivity 2-D force sensor for assembly of surface MEMS devices."

Yantao Shen et al. (2004)

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DOI: 10.1109/IROS.2004.1389936

access: closed

type: Conference or Workshop Paper

metadata version: 2020-11-27

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Yantao Shen, Ning Xi, Uchechukwu C. Wejinya, Wen J. Li:
High sensitivity 2-D force sensor for assembly of surface MEMS devices. IROS 2004: 3363-3368

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