"Fabrication Process and Structural Characterization of Fused ..."

Daryosh Vatanparvar, Doreen Hii, Andrei M. Shkel (2021)

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DOI: 10.1109/SENSORS47087.2021.9639662

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Daryosh Vatanparvar, Doreen Hii, Andrei M. Shkel:
Fabrication Process and Structural Characterization of Fused Silica-on-Silicon Toroidal Ring Gyroscope. IEEE SENSORS 2021: 1-4

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