"Capacity planning of a photolithography work cell in a wafer manufacturing ..."

Anne M. Spence, Douglas J. Welter (1987)

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DOI: 10.1109/ROBOT.1987.1087949

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Anne M. Spence, Douglas J. Welter:
Capacity planning of a photolithography work cell in a wafer manufacturing line. ICRA 1987: 702-708

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