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"Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage."
Zhong Chen et al. (2021)
- Zhong Chen, Junjie Shi, Songwei Zhu, Xineng Zhong, Xianmin Zhang:
Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage. ICRA 2021: 6986-6991
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