"Design and Analysis of a Novel XY Micro-positioning Stage Used Corrugated ..."

Nianfeng F. Wang, Xiaohe Liang, Xianmin Zhang (2014)

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DOI: 10.1007/978-3-319-13963-0_59

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-11

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Nianfeng F. Wang, Xiaohe Liang, Xianmin Zhang:
Design and Analysis of a Novel XY Micro-positioning Stage Used Corrugated Flexure Beams. ICIRA (2) 2014: 586-595

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