"Combined Model-Free Decoupling Control and Double Resonant Control in ..."

Jie Ling et al. (2016)

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DOI: 10.1007/978-3-319-43506-0_5

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-21

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Jie Ling, Zhao Feng, Min Ming, Xiaohui Xiao:
Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning. ICIRA (1) 2016: 51-62

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