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"SIMS analysis of atomic composition of silicon-germanium films deposited ..."
Hiram E. Martinez, Andrey Kosarev, Y. Kudriavtsev (2015)
- Hiram E. Martinez, Andrey Kosarev, Y. Kudriavtsev:
SIMS analysis of atomic composition of silicon-germanium films deposited by RF plasma discharge. CCE 2015: 1-3
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