"Effect of the silicon membrane flatness defect on the piezoresistive ..."

Zohir Dibi, Ali Boukabache, Patrick Pons (2000)

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DOI: 10.1109/ICECS.2000.913010

access: closed

type: Conference or Workshop Paper

metadata version: 2021-01-20

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Zohir Dibi, Ali Boukabache, Patrick Pons:
Effect of the silicon membrane flatness defect on the piezoresistive pressure sensor response. ICECS 2000: 853-856

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