"Robust two-time scale control system design for reactive Ion etching system."

Nicolae Tudoroiu, Kash Khorasani, Valery D. Yurkevich (2003)

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DOI: 10.23919/ECC.2003.7085122

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Nicolae Tudoroiu, Kash Khorasani, Valery D. Yurkevich:
Robust two-time scale control system design for reactive Ion etching system. ECC 2003: 1193-1198

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