"Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic ..."

Dong-Hyeok Son et al. (2015)

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DOI: 10.1109/ESSDERC.2015.7324730

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Dong-Hyeok Son, Young-woo Jo, Ryun-Hwi Kim, Chan Heo, Jae Hwa Seo, Jin Su Kim, In Man Kang, Sorin Cristoloveanu, Jung-Hee Lee:
Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic wet etching in TMAH solution. ESSDERC 2015: 130-133

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