"WS2 transistors on 300 mm wafers with BEOL compatibility."

Tom Schram et al. (2017)

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DOI: 10.1109/ESSDERC.2017.8066629

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Tom Schram, Quentin Smets, Benjamin Groven, M. H. Heyne, E. Kunnen, A. Thiam, Katia Devriendt, Annelies Delabie, Dennis Lin, M. Lux, Daniele Chiappe, I. Asselberghs, S. Brus, Cedric Huyghebaert, S. Sayan, A. Juncker, Matty Caymax, Iuliana P. Radu:
WS2 transistors on 300 mm wafers with BEOL compatibility. ESSDERC 2017: 212-215

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