"Vertical field effect transistor with sub-15nm gate-all-around on Si ..."

Guilhem Larrieu et al. (2015)

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DOI: 10.1109/ESSDERC.2015.7324750

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-27

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Guilhem Larrieu, Y. Guerfi, X. L. Han, N. Clement:
Vertical field effect transistor with sub-15nm gate-all-around on Si nanowire array. ESSDERC 2015: 202-205

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