"(100)- and (110)-oriented nMOSFETs with highly scaled EOT in ..."

Takamasa Kawanago et al. (2012)

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DOI: 10.1109/ESSDERC.2012.6343340

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Takamasa Kawanago, Kuniyuki Kakushima, Parhat Ahmet, Yoshinori Kataoka, Akira Nishiyama, Nobuyuki Sugii, Kazuo Tsutsui, Kenji Natori, Takeo Hattori, Hiroshi Iwai:
(100)- and (110)-oriented nMOSFETs with highly scaled EOT in La-silicate/Si interface for multi-gate architecture. ESSDERC 2012: 89-92

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