"Mobility Enhancement of Monolayer MoS2 Transistors using Tensile-Stressed ..."

Marc Jaikissoon et al. (2022)

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DOI: 10.1109/DRC55272.2022.9855790

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

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Marc Jaikissoon, Jerry A. Yang, Kathryn M. Neilson, Eric Pop, Krishna C. Saraswat:
Mobility Enhancement of Monolayer MoS2 Transistors using Tensile-Stressed Silicon Nitride Capping Layers. DRC 2022: 1-2

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