"Thermal stability of ALD-grown SiO2 and Al2O3 on (010) β-Ga2O3 ..."

Ahmad Islam et al. (2022)

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DOI: 10.1109/DRC55272.2022.9855795

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-08

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Ahmad Islam, Adam Miesle, M. Dietz, Kevin D. Leedy, S. Ganguli, G. Subramanyam, Weisong Wang, Nicholas Sepelak, Daniel Dryden, Stephen E. Tetlak, Kyle J. Liddy, Andrew J. Green, Kelson D. Chabak:
Thermal stability of ALD-grown SiO2 and Al2O3 on (010) β-Ga2O3 substrates. DRC 2022: 1-2

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