"On design of test structures for lithographic process corner identification."

Aswin Sreedhar, Sandip Kundu (2011)

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DOI: 10.1109/DATE.2011.5763136

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Aswin Sreedhar, Sandip Kundu:
On design of test structures for lithographic process corner identification. DATE 2011: 800-805

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