"On linewidth-based yield analysis for nanometer lithography."

Aswin Sreedhar, Sandip Kundu (2009)

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DOI: 10.1109/DATE.2009.5090693

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Aswin Sreedhar, Sandip Kundu:
On linewidth-based yield analysis for nanometer lithography. DATE 2009: 381-386

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