"Layout optimization and template pattern verification for directed ..."

Zigang Xiao et al. (2015)

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DOI: 10.1145/2744769.2747934

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  - conf/dac/XiaoGWYTW15
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Zigang Xiao, Daifeng Guo, Martin D. F. Wong, He Yi, Maryann C. Tung, H.-S. Philip Wong:
Layout optimization and template pattern verification for directed self-assembly (DSA). DAC 2015: 199:1-199:6

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