"Development of a Framework for Analyzing Process Monitoring Data with ..."

Yeo-Hun Yoon et al. (2002)

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DOI: 10.1007/978-3-642-57489-4_42

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-27

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Yeo-Hun Yoon, Young-Sang Kim, Sung-Jun Kim, Bong-Jin Yum:
Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process. COMPSTAT 2002: 297-302

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