"Modeling and control of electrostatically levitated MEMS."

Michael Andonian, Kenneth Pyle, Robert T. M'Closkey (2021)

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DOI: 10.1109/CCTA48906.2021.9658698

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-11

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Michael Andonian, Kenneth Pyle, Robert T. M'Closkey:
Modeling and control of electrostatically levitated MEMS. CCTA 2021: 880-886

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