"A simulator for local anodic oxidation of silicon surfaces."

Lado Filipovic et al. (2011)

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DOI: 10.1109/CCECE.2011.6030543

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Lado Filipovic, Hajdin Ceric, Johann Cervenka, Siegfried Selberherr:
A simulator for local anodic oxidation of silicon surfaces. CCECE 2011: 695-698

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