"Experimental-model-based precision control of a piezoelectric actuated ..."

Zhiming Gong et al. (2005)

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DOI: 10.1109/COASE.2005.1506756

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Zhiming Gong, Edwin Hui Leong Ho, Guilin Yang, Wei Lin:
Experimental-model-based precision control of a piezoelectric actuated flexure stage. CASE 2005: 124-129

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