"Fast Routing Algorithm for Mask Stitching Region of Ultra Large Wafer ..."

Zhen Zhuang et al. (2025)

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DOI: 10.1145/3658617.3703133

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-07

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Zhen Zhuang, Quan Chen, Hao Yu, Tsung-Yi Ho:
Fast Routing Algorithm for Mask Stitching Region of Ultra Large Wafer Scale Integration. ASP-DAC 2025: 279-284

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