"Lithography hotspot detection by two-stage cascade classifier using ..."

Yoichi Tomioka et al. (2017)

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DOI: 10.1109/ASPDAC.2017.7858300

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Yoichi Tomioka, Tetsuaki Matsunawa, Chikaaki Kodama, Shigeki Nojima:
Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation. ASP-DAC 2017: 81-86

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