"Character design and stamp algorithms for Character Projection ..."

Peng Du et al. (2012)

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DOI: 10.1109/ASPDAC.2012.6165050

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-07

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Peng Du, Wenbo Zhao, Shih-Hung Weng, Chung-Kuan Cheng, Ronald L. Graham:
Character design and stamp algorithms for Character Projection Electron-Beam Lithography. ASP-DAC 2012: 725-730

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