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"Oxygen-plasma-based digital etching for GaN/AlGaN high electron mobility ..."
Jingyi Wu et al. (2019)
- Jingyi Wu, Hongyu Yu, Yang Jiang, Zeyu Wan, Siqi Lei, Wei-Chih Cheng, Guangnan Zhou, Robert Sokolovskij, Qing Wang, Guangrui Maggie Xia:
Oxygen-plasma-based digital etching for GaN/AlGaN high electron mobility transistors. ASICON 2019: 1-4
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