"Rapid Growth of SiO2 on SiC with Low Ditusing High Pressure Microwave ..."

Shengkai Wang et al. (2019)

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DOI: 10.1109/ASICON47005.2019.8983626

access: closed

type: Conference or Workshop Paper

metadata version: 2020-02-12

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Shengkai Wang, Jilong Hao, Nannan You, Yun Bai, Xinyu Liu:
Rapid Growth of SiO2 on SiC with Low Ditusing High Pressure Microwave Oxygen Plasma. ASICON 2019: 1-4

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