"An Automated System for Checking Lithography Friendliness of Standard Cells."

I-Lun Tseng et al. (2018)

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DOI: 10.1109/APCCAS.2018.8605687

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-23

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I-Lun Tseng, Yongfu Li, Valerio Perez, Vikas Tripathi, Zhao Chuan Lee, Yoong Seang Jonathan Ong:
An Automated System for Checking Lithography Friendliness of Standard Cells. APCCAS 2018: 261-265

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