"Manufacturability-aware mask assignment in multiple patterning lithography."

Yukihide Kohira et al. (2016)

> Home

Details and statistics

DOI: 10.1109/APCCAS.2016.7804023

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/apccas/Kohira0MKNT16
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/apccas/Kohira0MKNT16
Yukihide Kohira, Atsushi Takahashi, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka:
Manufacturability-aware mask assignment in multiple patterning lithography. APCCAS 2016: 538-541

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.