"A run-to-run film thickness control of chemical-mechanical planarization ..."

Jingang Yi, Wei-Shu Sang, E. Zhao (2005)

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DOI: 10.1109/ACC.2005.1470643

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-07

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Jingang Yi, Wei-Shu Sang, E. Zhao:
A run-to-run film thickness control of chemical-mechanical planarization processes. ACC 2005: 4231-4236

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