"A Parallel Type Micro-Robotic System for Semi-Conductor Manufacturing ..."

Michael Pumphrey et al. (2021)

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DOI: 10.1109/AIM46487.2021.9517669

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Michael Pumphrey, Aylar Abouzarkhanifard, Lihong Zhang, Mohammad Al Janaideh:
A Parallel Type Micro-Robotic System for Semi-Conductor Manufacturing Machines: Preliminary Results. AIM 2021: 532-539

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