"Micro-Force sensor by active control of a comb-drive."

Abdenbi Mohand-Ousaid et al. (2013)

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DOI: 10.1109/AIM.2013.6584160

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Abdenbi Mohand-Ousaid, D. Sinan Haliyo, Stéphane Régnier, Vincent Hayward:
Micro-Force sensor by active control of a comb-drive. AIM 2013: 612-617

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