"A linearized model for control of automated polishing process."

Liang Liao, Fengfeng Xi (2005)

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DOI: 10.1109/CCA.2005.1507258

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-14

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Liang Liao, Fengfeng Xi:
A linearized model for control of automated polishing process. CCA 2005: 986-991

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