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"Silicon-interposer with high density Cu-filled TSVs."
Robert Wieland et al. (2010)
- Robert Wieland, Kai Zoschke, Nils Jurgensen, Karl-Reinhard Merkel, Lars Nebrich, Jürgen Wolf:
Silicon-interposer with high density Cu-filled TSVs. 3DIC 2010: 1-4
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