"Influential factors in low-temperature direct bonding of silicon dioxide."

Ryouya Shirahama et al. (2015)

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DOI: 10.1109/3DIC.2015.7334585

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

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Ryouya Shirahama, Sethavut Duangchan, Yusuke Koishikawa, Akiyoshi Baba:
Influential factors in low-temperature direct bonding of silicon dioxide. 3DIC 2015: TS8.16.1-TS8.16.5

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