"Fabrication tolerance evaluation of high efficient unidirectional optical ..."

Akihiro Noriki et al. (2011)

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DOI: 10.1109/3DIC.2012.6262957

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type: Conference or Workshop Paper

metadata version: 2021-02-16

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Akihiro Noriki, Kang Wook Lee, Jichoel Bea, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi:
Fabrication tolerance evaluation of high efficient unidirectional optical coupler for though silicon photonic via in optoelectronic 3D-LSI. 3DIC 2011: 1-4

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