"Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement ..."

Ji Chel Bea et al. (2009)

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DOI: 10.1109/3DIC.2009.5306568

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Ji Chel Bea, Mariappan Murugesan, Yuki Ohara, Akihiro Noriki, Hisashi Kino, Kang Wook Lee, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi:
Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration. 3DIC 2009: 1-5

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