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J. Tracy Weed

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Journal Articles

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1997
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  - journals/ibmrd/BuddDSMFW97
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  - https://dblp.org/rec/journals/ibmrd/BuddDSMFW97
Russell A. Budd, Derek B. Dove, John L. Staples, Ronald M. Martino, Richard A. Ferguson, J. Tracy Weed:
Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS. IBM J. Res. Dev. 41(1&2): 119-130 (1997)

Conference and Workshop Papers

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2008
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S. Turnoy, Peter Wintermayr, Robert C. Aitken, Rudy Lauwereins, J. Tracy Weed, V. Kiefer, J. Hartmann:
Panel Session - Caution Ahead: The Road to Design and Manufacturing at 32 and 22 nm. DATE 2008: 510

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