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Masaru Moriwaki

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2001
[j1]
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Takayuki Yamada, Masaru Moriwaki, Yoshinao Harada, Shinji Fujii, Koji Eriguchi:
Effects of the sputtering deposition process of metal gate electrode on the gate dielectric characteristics. Microelectron. Reliab. 41(5): 697-704 (2001)

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