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Anatoly N. Lukin

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2023
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Vladimir A. Terekhov, Evgeniy I. Terukov, Yurii K. Undalov, Konstantin A. Barkov, Nikolay A. Kurilo, Sergey A. Ivkov, Dmitry N. Nesterov, Pavel Seredin, Dmitry Goloshchapov, Dmitry Minakov, Elena V. Popova, Anatoly N. Lukin, Irina N. Trapeznikova:
Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition. Symmetry 15(9): 1800 (2023)

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