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A. Roybardhan

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1987
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J. K. Singh, A. Roybardhan, H. S. Kothari, B. R. Singh, W. S. Khokle:
Dependence of process parameters on planarization isolation and etching of sloped vias in polyimides for GaAs ICs. Proc. IEEE 75(6): 850-852 (1987)

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